FACILITIES
Innovation
Sensor and Device Cleanrooms
CRD – silicon detectors cleanroom
The silicon detectors cleanroom extends over 700 sqm, and is classified ISO 4-5. It is
equipped with a double-side mask aligner and a stepper granting a minimum line widht of 500 nm. It processes 150mm wafers and it is mainly dedicated to radiation sensors and integrated photonics. To maintain the yield and quality standards achieved it follows strict rules and requirements in terms of contamination (wafer exchange with other laboratories, materials and processes allowed).
CRM – MEMS and NEMS cleanroom
The MEMS and NEMS cleanroom extends over 500 sqm, and is classified ISO 5-6 class. It is equipped with a single-side mask aligner with a minimum line width of 2.5 μm. It is a general purpose cleanroom facility with higher flexibility in terms of materials.
CRP – packaging and integration cleanroom
The packaging and integration cleanroom extends over 60 sqm, and is classified ISO 6 class. It is equipped with precision manual pick & place and bonder for prototype assembly.
CR3D – 3D integration cleanroom
The 3D integration cleanroom extends over 180 sqm, and is classified ISO 4/5 class. It is equipped with the complete line of systems which allow the processing of Back-side illuminated sensors and vertical integration, Wafer bonding (permanent metal, temporary) and debonding, TSV interconnections and Wafer grinding and polishing.
Sustainable Energies laboratories and testing facilities
Battery Laboratory
Laboratory for electro-chemical testing of new prototypes of next generation batteries.
Hydrogen Laboratory
Laboratory for electro-chemical and mechanical testing of new prototypes for hydrogen production
Advanced Materials Laboratory
Laboratory for development of thin layers, nanostructured materials, novel energy conversion processes
Chemistry Laboratory
Laboratory for characterization of physical and chemical properties on novel materials
